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Study of nanocrystalline Ta(N,O) diffusion barriers for use in Cu metallization

Materials EngineeringMaterials ScienceDiffusion BarriersNanocrystalline TaEngineeringDiffusion ResistanceNanomaterialsNanotechnologyApplied PhysicsMetallurgical InteractionMetallurgical SystemNanocrystalline MaterialMicrostructureCu Metallization