Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films - Concepedia

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Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

152

Citations

18

References

1997

Year

M. Stavrev, D. Fischer, Christian Wenzel, K. Drescher, N. Mattern

Thin Solid Films

Materials ScienceSurface CharacterizationMaterial AnalysisTano Thin FilmsEngineeringSurface ScienceApplied PhysicsMorphological CharacterizationThin FilmsThin Film Processing

References

	Year	Citations

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