Concepedia

Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

M. Stavrev, D. Fischer, Christian Wenzel, K. Drescher, N. Mattern

Thin Solid Films · 1997 · 155 citations · 18 references

DOI

Concepts

References

18

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Diffusion phenomena in thin films and microelectronic materials

H.K.H. · Materials Research Bulletin · 1989 · 218 citations

, , +16

Barriers Against Copper Diffusion into Silicon and Drift Through Silicon Dioxide

Shi‐Qing Wang · MRS Bulletin · 1994 · 195 citations

, , +14

Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum Films

D. Gerstenberg, C. J. Calbick · Journal of Applied Physics · 1964 · 179 citations

, , +16

Structure of Tantalum Nitrides

Nobuzo Terao · Japanese Journal of Applied Physics · 1971 · 175 citations

, , +12