Materials Research Bulletin · 1989 · 218 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsCarrier TransportSemiconductor Thin FilmsThin Film DiffusionThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsDiffusion BarriersDiffusion In Semiconductor Thin FilmsDiffusion KineticsDiffusion ProfilesInterface DiffusionReaction-diffusion PhenomenaThin Oxide Films