Concepedia

Publication | Closed Access

Effects of precursors on nucleation in atomic layer deposition of HfO2

DOI

48

Citations

21

References

2004

Year

Jaan Aarik, Aleks Aidla, Arvo Kikas, Tanel Käämbre, Raul Rammula, Peeter Ritslaid, Teet Uustare, Väino Sammelselg
Applied Surface Science

References

YearCitations

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