Concepedia

A. Londergan

AL

Statistics

Publications

3

Citations

340

H-Index

3

Active since

2001

Affiliations

Genus (United States)(Current)

A. Londergan is an author at Genus (United States) specializing in applied physics, surface science, and engineering.

Top concepts

Publications per year

2001–2002

3

Publications

3

Thin film atomic layer deposition equipment for semiconductor processing

Ofer Sneh, R. Clark-Phelps, A. Londergan et al. · Thin Solid Films · 2002 · 287 citations

, , +6

Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt Formation Mechanisms and Associated Properties

A. Londergan, Guillermo M. Nuesca, Cindy Goldberg et al. · Journal of The Electrochemical Society · 2001 · 40 citations

, , +17

Atomic layer deposition

Shiqing Wang, Ofer Sneh, A. Londergan et al. · 2002 · 13 citations

, , +16

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