Statistics
Publications
4
Citations
639
H-Index
4
Active since
1998
Affiliations
R. Clark-Phelps is an author at Lawrence Berkeley National Laboratory specializing in materials science, electronic materials, and semiconductor device materials.
Publications per year
1998–2006
4
4
Thin film atomic layer deposition equipment for semiconductor processing
Ofer Sneh, R. Clark-Phelps, A. Londergan et al. · Thin Solid Films · 2002 · 290 citations
Natural Sciences, Materials Engineering, Materials Science +12
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