Concepedia

Aleks Aidla

AA

56

Publications

4K

Citations

35

H-Index

1994

Active since

Affiliations

University of Tartu(Current)

Uppsala University

University of Helsinki

Estonian Academy of Sciences

Institute of Electrical Engineering of the Slovak Academy of Sciences

Aleks Aidla is an author at University of Tartu specializing in engineering, materials science, and surface science.

Top concepts

EngineeringMaterial ScienceSurface ScienceApplied PhysicsThin FilmsChemistryMaterials EngineeringTitanium Dioxide MaterialsChemical EngineeringNanomaterials

Publications per year

1994–2014

56

Publications

56

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Journal of Crystal Growth · 1995 · 298 citations

Materials Science, Engineering, Oxide Electronics +8

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler et al. · Thin Solid Films · 1999 · 286 citations

Materials Science, Engineering, Surface Science +9

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler et al. · Thin Solid Films · 1997 · 276 citations

Materials Science, Crystal Structure, Optical Materials +10

Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism

Jaan Aarik, Aleks Aidla, Hugo Mändar et al. · Applied Surface Science · 2001 · 226 citations

Materials Engineering, Materials Science, Chemical Engineering +10

Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Applied Surface Science · 2000 · 208 citations

Materials Science, Engineering, Oxidation Resistance +8

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