Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare, +1

Journal of Crystal Growth

Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied Physics +6

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler, +2

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsSubstrate Temperature +7

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler, +2

Thin Solid Films

Materials ScienceCrystal StructureOptical MaterialsEngineeringOptical Properties +8

Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism

Jaan Aarik, Aleks Aidla, Hugo Mändar, +1

Applied Surface Science

Materials EngineeringMaterials ScienceChemical EngineeringEngineeringTitanium Dioxide +8

Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process

Jaan Aarik, Aleks Aidla, Teet Uustare, +2

Applied Surface Science

Materials ScienceEngineeringOxidation ResistanceSurface ScienceTitanium Isopropoxide +6

Anomalous effect of temperature on atomic layer deposition of titanium dioxide

Jaan Aarik, Aleks Aidla, Hugo Mändar, +1

Journal of Crystal Growth

Materials ScienceEngineeringTitanium DioxideSurface ScienceApplied Physics +5

Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Hugo Mändar, +2

Journal of Crystal Growth

Materials ScienceEngineeringTexture DevelopmentNanomaterialsNanotechnology +7

Ti 2p and O 1s X-ray absorption of TiO2 polymorphs

R. Ruus, Arvo Kikas, A. Saar, +6

Solid State Communications

Materials ScienceX-ray SpectroscopyEngineeringX-ray DiffractionChemistry +3

Properties of tantalum oxide thin films grown by atomic layer deposition

Kaupo Kukli, Jaan Aarik, Aleks Aidla, +3

Thin Solid Films

Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied Physics +6

Atomic Layer Chemical Vapor Deposition of TiO[sub 2] Low Temperature Epitaxy of Rutile and Anatase

Mikael Schuisky, Anders Hårsta, Aleks Aidla, +3

Journal of The Electrochemical Society

Materials EngineeringMaterials ScienceAnatase PhaseEpitaxial GrowthEngineering +13