Publication | Closed Access
Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films
286
Citations
15
References
1999
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsSubstrate TemperatureChemical Vapor DepositionThin FilmsMolecular Beam EpitaxyEpitaxial GrowthAtomic Layer GrowthHfo2 Thin FilmsThin Film Processing
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