E. Nykänen

Growth of titanium dioxide thin films by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 306 citations

Materials Science, Epitaxial Growth, Engineering +8

Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method

Lassi Hiltunen, Markku Leskelä, Maarit Mäkelä et al. · Thin Solid Films · 1988 · 101 citations

Materials Engineering, Materials Science, Engineering +5

Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes

Lassi Hiltunen, H. Kattelus, Markku Leskelä et al. · Materials Chemistry and Physics · 1991 · 85 citations

Materials Engineering, Materials Science, Engineering +8

Growth of PbS thin films from novel precursors by atomic layer epitaxy

E. Nykänen, Jutta Laine-Ylijoki, P. Soininen et al. · Journal of Materials Chemistry · 1994 · 44 citations

Materials Science, Epitaxial Growth, Engineering +15

Preparation of lead sulfide thin films by the atomic layer epitaxy process

Markku Leskelä, Lauri Niinistö, Pentti Niemelä et al. · Vacuum · 1990 · 44 citations

Materials Science, Epitaxial Growth, Engineering +5