Maarit Mäkelä

Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method

Lassi Hiltunen, Markku Leskelä, Maarit Mäkelä et al. · Thin Solid Films · 1988 · 101 citations

Materials Engineering, Materials Science, Engineering +5

Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processes

Lassi Hiltunen, H. Kattelus, Markku Leskelä et al. · Materials Chemistry and Physics · 1991 · 85 citations

Materials Engineering, Materials Science, Engineering +8

Thermal Atomic Layer Deposition of Continuous and Highly Conducting Gold Thin Films

Maarit Mäkelä, Timo Hatanpää, Kenichiro Mizohata et al. · Chemistry of Materials · 2017 · 52 citations

Materials Science, Thin Film Physics, Au Thin Films +15

Studies on Thermal Atomic Layer Deposition of Silver Thin Films

Maarit Mäkelä, Timo Hatanpää, Kenichiro Mizohata et al. · Chemistry of Materials · 2017 · 42 citations

Engineering, Catalytic Ru Surface, Ag Thin Films +19

Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings

Aleksandra Radtke, Tomasz Jędrzejewski, Wiesław Kozak et al. · Nanomaterials · 2017 · 34 citations · Full text

Materials Science, Nanoparticles, Chemical Engineering +13