Jaan Aarik

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Journal of Crystal Growth · 1995 · 298 citations

Materials Science, Engineering, Oxide Electronics +8

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler et al. · Thin Solid Films · 1999 · 286 citations

Materials Science, Engineering, Surface Science +9

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler et al. · Thin Solid Films · 1997 · 276 citations

Materials Science, Crystal Structure, Optical Materials +10

Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism

Jaan Aarik, Aleks Aidla, Hugo Mändar et al. · Applied Surface Science · 2001 · 226 citations

Materials Engineering, Materials Science, Chemical Engineering +10

Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Applied Surface Science · 2000 · 208 citations

Materials Science, Engineering, Oxidation Resistance +8