Publication | Closed Access
Morphology and structure of TiO2 thin films grown by atomic layer deposition
298
Citations
17
References
1995
Year
Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsTio2 Thin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing
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