Thin Solid Films · 1997 · 276 citations · 13 references
Natural SciencesMaterials SciencePhysicsCrystal StructureOptical MaterialsThin FilmsAtomic Layer DepositionCrystal GrowthOptical Properties Of SolidsOptical Thin FilmsThin Film Optical PropertiesThin-film MaterialsAtomic Layer Deposition PrecursorsEpitaxial Film GrowthFilm Growth MechanismsOptical PropertiesOxide Growth KineticsSurface Optical PropertiesThin-film Growth MechanismsTitanium Oxides
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Electrical and optical properties of TiO2 anatase thin films
Hongyu Tang, K. Prasad, R. Sanjinés et al. · Journal of Applied Physics · 1994 · 1.8K citations
Growth of titanium dioxide thin films by atomic layer epitaxy
Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 307 citations
Natural Sciences, Materials Engineering, Materials Science +14