Publication | Closed Access
Chemical vapor deposition and characterization of HfO2 films from organo-hafnium compounds
350
Citations
12
References
1977
Year
Materials EngineeringMaterials ScienceHfo2 FilmsEngineeringOxide ElectronicsSurface ScienceOrgano-hafnium CompoundsChemistryHydrogenChemical DepositionFunctional MaterialsChemical Vapor Deposition
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