Thin films of metal oxides on silicon by chemical vapor deposition with organometallic compounds. I

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

Natural Sciences, Materials Engineering, Materials Science +11

Structural Evaluation of Silicon Oxide Films

W. A. Pliskin, H. Lehman · Journal of The Electrochemical Society · 1965 · 349 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Preparation of Ultra‐High‐Purity Submicron Refractory Oxides

K. S. Mazdiyasni, C. T. Lynch, James S. Smith · Journal of the American Ceramic Society · 1965 · 224 citations

Natural Sciences, Materials Engineering, Materials Science +15

Cubic Phase Stabilization of Translucent Yttria‐Zirconia at Very Low Temperatures

K. S. Mazdiyasni, C. T. Lynch, James S. Smith · Journal of the American Ceramic Society · 1967 · 215 citations

Natural Sciences, Materials Engineering, Materials Science +15

preparation, properties and optical applications of thin films of titanium dioxide

G. Hass · Vacuum · 1952 · 146 citations

Natural Sciences, Materials Engineering, Materials Science +16