Delayed relaxation by surfactant action in highly strained III-V semiconductor epitaxial layers

N. Grandjean, J. Massies, V. H. Etgens

Physical Review Letters · 1992 · 146 citations · 12 references

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Abstract

It is demonstrated that the concept of surfactant applies to the epitaxial growth of highly strained III-V semiconductors. The pseudomorphic growth regime of the InAs on GaAs(001) is extended from 1.5 to 6 monolayers by the use of Te as surfactant. This delayed plastic relaxation of the strain is correlated with the modification of the growth mode via surface energy minimization.

References

12