Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components - Concepedia

Concepedia

Publication | Open Access

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

DOI Full Paper Access

29

Citations

7

References

1998

Year

L. Dellmann, S. Roth, C. Beuret, L. Paratte, G.-A. Racine, H. Lorenz, M. Despont, Philippe Renaud, P. Vettiger, Ν. F. de Rooij

Microsystem Technologies

Materials SciencePiezoelectric Motor ComponentsEngineeringMicromechanicsFlexible ElectronicsMicrofabricationMechanical EngineeringFabrication TechniquePhotopolymer High-aspect RatioPiezoelectric MaterialMolding (Process)3D PrintingMicrostructure

References

	Year	Citations

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