Concepedia

Publication | Closed Access

Growth of lanthanum oxide films for application as a gate dielectric in CMOS technology

DOI

37

Citations

10

References

2004

Year

P. Písečný, K. Hušeková, K. Fröhlich, L. Harmatha, J. Šoltýs, D. Machajdı́k, J.P. Espinós, M. Jergel, J. Jakabovič
Materials Science in Semiconductor Processing

References

YearCitations

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