Matti Putkonen

Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials

Lauri Niinist�, Minna Nieminen, J. P�iv�saari et al. · physica status solidi (a) · 2004 · 338 citations

Optical Materials, Engineering, Thin Film Process Technology +22

Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

Minna Nieminen, Matti Putkonen, Lauri Niinistö · Applied Surface Science · 2001 · 197 citations

Materials Science, Engineering, Oxide Electronics +7

A comparative study on lanthanide oxide thin films grown by atomic layer deposition

Jani Päiväsaari, Matti Putkonen, Lauri Niinistö · Thin Solid Films · 2004 · 172 citations

Materials Science, Engineering, Nanoelectronics +9

Effect of annealing in processing of strontium titanate thin films by ALD

Anne Kosola, Matti Putkonen, Leena‐Sisko Johansson et al. · Applied Surface Science · 2003 · 150 citations

Materials Engineering, Materials Science, Material Analysis +7

Properties of AlN grown by plasma enhanced atomic layer deposition

Markus Bosund, Timo Sajavaara, Mikko Laitinen et al. · Applied Surface Science · 2011 · 124 citations

Materials Science, Aluminium Nitride, Engineering +8