Concepedia

Effect of annealing in processing of strontium titanate thin films by ALD

Anne Kosola, Matti Putkonen, Leena‐Sisko Johansson, Lauri Niinistö

Applied Surface Science · 2003 · 151 citations · 38 references

DOI

Concepts

References

38

High-κ gate dielectrics: Current status and materials properties considerations

G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.9K citations

, , +17

High Resolution XPS of Organic Polymers

G. Beamson · Analytica Chimica Acta · 1992 · 1.7K citations

, , +9

Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Anne C. Dillon, A. W. Ott, J. Douglas Way et al. · Surface Science · 1995 · 459 citations

, , +15

The handbook of infrared and Raman spectra of inorganic compounds and organic salts

Kazuo Nakamoto · Vibrational Spectroscopy · 1997 · 417 citations

, , +16

Volatile Rare Earth Chelates

Kent J. Eisentraut, Robert E. Sievers · Journal of the American Chemical Society · 1965 · 354 citations

, , +5