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Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Materials ScienceAluminium NitrideChemical EngineeringEngineeringBinary Reaction SequenceSurface ChemistryCorrosionAl2o3 DepositionSurface ScienceCatalysisHydrogenChemistryChemical DepositionSurface ProcessingSurface Reactivity