Solid-State Electronics · 1990 · 22 citations · 13 references
Semiconductor TechnologyPolysilicon GateElectrical EngineeringMos-devices—analytical ModelingEngineeringOxide ElectronicsOxide SemiconductorsApplied PhysicsNon-degenerate DopingSemiconductor Device
13
Dopant segregation in polycrystalline silicon
Mohammad M. Mandurah, Krishna C. Saraswat, C. R. Helms et al. · Journal of Applied Physics · 1980 · 370 citations
T. G. Castner, N. K. Lee, G. S. Cieloszyk et al. · Physical Review Letters · 1975 · 189 citations