Publication | Closed Access

Optimisation of the Ti/Al/Ni/Au ohmic contact on AlGaN/GaN FET structures

Materials EngineeringMaterials ScienceElectrical EngineeringWide-bandgap SemiconductorEngineeringAluminium NitrideNanoelectronicsSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceAlgan/gan Fet StructuresMicroelectronicsCategoryiii-v Semiconductor