Frontside bulk silicon micromachining using porous-silicon technology

Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

Leigh Canham · Applied Physics Letters · 1990 · 7.9K citations

Materials Science, Electrical Engineering, Chemical Dissolution +15

Micromachining applications of porous silicon

Peter Steiner, Walter Lang · Thin Solid Films · 1995 · 173 citations

Materials Science, Engineering, Micromachines +8

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser et al. · IEEE Transactions on Electron Devices · 1988 · 157 citations

Engineering, Severe Plastic Deformation, Micromechanics +21

Porous silicon: A novel material for microsystems

Walter Lang, Peter Steiner, H. Sandmaier · Sensors and Actuators A Physical · 1995 · 78 citations

Materials Science, Engineering, Nanoporous Material +4

The development of a low-stress polysilicon process compatible with standard device processing

P.J. French, B.P. van Drieënhuizen, Daniel Puiu Poenar et al. · Journal of Microelectromechanical Systems · 1996 · 72 citations

Engineering, Mechanical Engineering, Silicon On Insulator +18