Characteristics of cross-sectional atom probe analysis on semiconductor structures

Atom probe field ion microscopy

M.K. Miller · Vacuum · 1994 · 812 citations

Natural Sciences, Physics, Atomic Physics +2

High-performance fully depleted silicon nanowire (diameter /spl les/ 5 nm) gate-all-around CMOS devices

Navab Singh, Ajay Agarwal, L. K. Bera et al. · IEEE Electron Device Letters · 2006 · 639 citations

Engineering, Electrical Engineering, Materials Science +17

Trajectory overlaps and local magnification in three-dimensional atom probe

F. Vurpillot, A. Bostel, D. Blavette · Applied Physics Letters · 2000 · 440 citations

Natural Sciences, Materials Science, Physics +8

A general protocol for the reconstruction of 3D atom probe data

Pierre‐Yves Le Bas, A. Bostel, B. Déconihout et al. · Applied Surface Science · 1995 · 428 citations

Computing, Physics, Atomic Physics +4

Femtosecond pump-probe reflectivity study of silicon carrier dynamics

A. J. Sabbah, D. M. Riffe · Physical review. B, Condensed matter · 2002 · 413 citations

Engineering, Materials Science, Physics +17