Ajay Kumar Kambham

Atom-probe for FinFET dopant characterization

Ajay Kumar Kambham, Jay Mody, M. Gilbert et al. · Ultramicroscopy · 2011 · 50 citations

Engineering, Physics, Finfet Dopant Characterization +5

In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography

Sebastian Koelling, Nicolas Innocenti, Andreas Schulze et al. · Journal of Applied Physics · 2011 · 49 citations

Engineering, Sem Imaging, Microscopy +19

Atom probe analysis of a 3D finFET with high-k metal gate

M. Gilbert, Wilfried Vandervorst, Sebastian Koelling et al. · Ultramicroscopy · 2010 · 42 citations

Atom Probe Analysis, Electrical Engineering, Engineering +8

Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography

Ajay Kumar Kambham, Arul Kumar, A. Florakis et al. · Nanotechnology · 2013 · 38 citations

Engineering, Microscopy, Atom Probe Tomography +20

Dopant/carrier profiling for 3D‐structures

Wilfried Vandervorst, Andreas Schulze, Ajay Kumar Kambham et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2013 · 27 citations

Engineering, Microscopy, 3D Modeling +18