Concepedia

Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength

Ling Liao, Desmond R. Lim, Anu Agarwal, Kevin C. Lee, Lionel C. Kimerling

Journal of Electronic Materials · 2000 · 92 citations · 5 references

DOI

Concepts

References

5

Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid-phase crystallization: Theory, experiments, and thin-film transistor applications

Noriyoshi Yamauchi, R. Reif · Journal of Applied Physics · 1994 · 142 citations

, , +17

Hydrogenation of polycrystalline silicon thin film transistors by plasma ion implantation

J.D. Bernstein, Shu Qin, Tsu-Jae King · IEEE Electron Device Letters · 1995 · 59 citations

, , +11

Losses in polycrystalline silicon waveguides

James Foresi, Marcie R. Black, Anu Agarwal et al. · Applied Physics Letters · 1996 · 53 citations

, , +15

Enhanced hydrogenation in polycrystalline silicon thin films using low-temperature ultrasound treatment

S. Ostapenko, L. Jastrzȩbski, J. Łagowski et al. · Applied Physics Letters · 1996 · 17 citations

, , +17

SEM overestimation of the mean grain size of chemically etched polycrystalline silicon films

D. Bisero · Materials Letters · 1994 · 11 citations

, , +16