Concepedia

SEM overestimation of the mean grain size of chemically etched polycrystalline silicon films

D. Bisero

Materials Letters · 1994 · 11 citations · 7 references

DOI

Concepts

References

7

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Chemical Etching of Silicon: IV . Etching Technology

B. Schwartz, Harry Robbins · Journal of The Electrochemical Society · 1976 · 350 citations

, , +17

Raman scattering from small particle size polycrystalline silicon

Zafar Iqbal, S. Vepřek, A.P. Webb et al. · Solid State Communications · 1981 · 326 citations

, , +12

Electrical Properties of Thermally and Laser Annealed Polycrystalline Silicon Films Heavily Doped with Arsenic and Phosphorus

S. Solmi, M. Severi, R. Angelucci et al. · Journal of The Electrochemical Society · 1982 · 45 citations

, , +16

Phosphorus Doped Polysilicon for Double Poly Structures: I . Morphology and Microstructure

M. Hendriks, C. Mavero · Journal of The Electrochemical Society · 1991 · 32 citations

, , +16