Solid-State Electronics · 2010 · 84 citations · 31 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsMicrofabricationSemiconductor DevicesChip PackagingDevice ScalingEtching ProcessesIntegrated Circuit DesignSemiconductor Thin FilmsThin Film EtchingSiliconSilicon Thin FilmsSilicon-on-insulator ProcessingThin-film SemiconductorsWafer Thinning
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Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
Ultralow-power organic complementary circuits
Hagen Klauk, Ute Zschieschang, Jens Pflaum et al. · Nature · 2007 · 1.4K citations
Smart Dust: communicating with a cubic-millimeter computer
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