Concepedia

Publication | Closed Access

Advanced activation of ultra-shallow junctions using flash-assisted RTP

DOI

52

Citations

9

References

2005

Year

W. Lerch, S. Paul, S. McCoy, T. Selinger, J. Gelpey, F. Cristiano, F. Séverac, Mathieu Gavelle, Simona Boninelli, P. Pichler,
Materials Science and Engineering B

References

YearCitations

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