3D structures for UV-NIL template fabrication with grayscale e-beam lithography

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 560 citations

Engineering, Electron-beam Lithography, Microscopy +18

Large scale ultraviolet-based nanoimprint lithography

B. Vratzov, Andreas Fuchs, Max C. Lemme et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 71 citations

Engineering, Electron-beam Lithography, Beam Lithography +17

Direct imprinting of dielectric materials for dual damascene processing

M. D. Stewart, Jeffery T. Wetzel, Gerard M. Schmid et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 32 citations

Dual Damascene Approach, Engineering, Electron-beam Lithography +16