Ulrich Barth is an author at Raith (Germany) specializing in engineering, microfabrication, and applied physics.
Top concepts
EngineeringApplied PhysicsOptoelectronicsMicrofabricationPhysics3D PrintingMaterial ScienceMicroelectronicsIntegrated Circuits
Publications per year
2007–2012
2
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High resolution and high density ion beam lithography employing HSQ resist
L. Bruchhaus, S. Bauerdick, Lloyd Peto et al. · Microelectronic Engineering · 2012 · 13 citations
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