Axel Rudzinski

Scalable Fabrication of Single Silicon Vacancy Defect Arrays in Silicon Carbide Using Focused Ion Beam

Junfeng Wang, Xiaoming Zhang, Yu Zhou et al. · ACS Photonics · 2017 · 73 citations · Full text

Engineering, Silicon On Insulator, Ion Implantation +16

Direct writing of single germanium vacancy center arrays in diamond

Yu Zhou, Zhao Mu, Giorgio Adamo et al. · New Journal of Physics · 2018 · 51 citations · Full text

3D structures for UV-NIL template fabrication with grayscale e-beam lithography

Guido Piaszenski, Ulrich Barth, Axel Rudzinski et al. · Microelectronic Engineering · 2007 · 35 citations

Materials Science, Engineering, Beam Lithography +8

High resolution and high density ion beam lithography employing HSQ resist

L. Bruchhaus, S. Bauerdick, Lloyd Peto et al. · Microelectronic Engineering · 2012 · 13 citations

Hsq Resist, High Resolution, Engineering +10

Terahertz dynamics of lattice vibrations in Au/CdTe plasmonic crystals: Photoinduced segregation of Te and enhancement of optical response

Lars E. Kreilkamp, V. I. Belotelov, B. A. Glavin et al. · Physical review. B./Physical review. B · 2016 · 10 citations · Full text