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Fabrication of short channel MOSFETs with refractory metal gates using RF sputter etching

Electrical EngineeringEngineeringRf SemiconductorMicrofabricationNanoelectronicsApplied PhysicsRefractory Metal GatesSemiconductor Device FabricationShort Channel MosfetsElectronic PackagingMicroelectronicsPlasma EtchingRf SputterSemiconductor Device