Refractory metal silicon device technology

Investigation of thermally oxidised silicon surfaces using metal-oxide-semiconductor structures

Andrew S. Grove, B. E. Deal, E. H. Snow et al. · Solid-State Electronics · 1965 · 416 citations

Engineering, Materials Engineering, Materials Science +14

DENSITY OF SiO2–Si INTERFACE STATES

Peter V. Gray, D.M. Brown · Applied Physics Letters · 1966 · 406 citations · Full text

Natural Sciences, Materials Science, Physics +10

Surface Protection and Selective Masking during Diffusion in Silicon

C. J. Frosch, L. Derick · Journal of The Electrochemical Society · 1957 · 167 citations

Natural Sciences, Materials Engineering, Materials Science +16

Si-SiO[sub 2] Fast Interface State Measurements

D.M. Brown, Peter V. Gray · Journal of The Electrochemical Society · 1968 · 137 citations

Engineering, Materials Engineering, Materials Science +17

The Etching of Silicon Nitride in Phosphoric Acid with Silicon Dioxide as a Mask

W. van Gelder, V.E. Hauser · Journal of The Electrochemical Society · 1967 · 126 citations

Engineering, Materials Engineering, Materials Science +17