W. van Gelder

Statistics

Publications

Citations

410

H-Index

Active since

1967

Affiliations

National Institute of Standards and Technology(Current)

W. van Gelder is an author at National Institute of Standards and Technology specializing in materials science, materials engineering, and semiconductor device materials.

Publications per year

1967–1983

Publications

The Etching of Silicon Nitride in Phosphoric Acid with Silicon Dioxide as a Mask

W. van Gelder, V.E. Hauser · Journal of The Electrochemical Society · 1967 · 126 citations

Engineering, Materials Engineering, Materials Science +17

Silicon Impurity Distribution as Revealed by Pulsed MOS C-V Measurements

W. van Gelder, E. H. Nicollian · Journal of The Electrochemical Society · 1971 · 121 citations

Engineering, Materials Engineering, Materials Science +14

Optical thickness measurement of SiO2Si3N4 films on silicon

F. Reizman, W. van Gelder · Solid-State Electronics · 1967 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +14

A Laser Interferometer System to Monitor Dry Etching of Patterned Silicon

Marek Sternheim, W. van Gelder, A. W. Hartman · Journal of The Electrochemical Society · 1983 · 43 citations

Engineering, Electrical Engineering, Instrumentation +15

Stacking faults in (100) epitaxial silicon caused by HF and thermal oxidation and effects on <i>p-n</i> junctions

C. M. Drum, W. van Gelder · Journal of Applied Physics · 1972 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

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