Concepedia
Statistics
Publications
3
Citations
114
H-Index
Active since
1969
D. G. Muth is an author specializing in thin films, thin-film deposition, and materials science.
Publications per year
1969–1972
Temperature Rise during Film Deposition by rf and dc Sputtering
S. S. Lau, R. H. Mills, D. G. Muth · Journal of Vacuum Science and Technology · 1972 · 65 citations
Natural Sciences, Materials Science, Physics +17
Ellipsometer Study of Anodic Oxides Formed on Sputtered Tantalum and Tantalum–Aluminum Alloy Films
D. G. Muth · Journal of Vacuum Science and Technology · 1969 · 25 citations
Natural Sciences, Materials Engineering, Materials Science +15
Sputtering Multilayered Conductor Films
D. G. Muth · Journal of Vacuum Science and Technology · 1971 · 24 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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