Ellipsometer Study of Anodic Oxides Formed on Sputtered Tantalum and Tantalum–Aluminum Alloy Films

Abstract

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation D. G. Muth; Ellipsometer Study of Anodic Oxides Formed on Sputtered Tantalum and Tantalum–Aluminum Alloy Films. Journal of Vacuum Science and Technology 1 July 1969; 6 (4): 749–752. https://doi.org/10.1116/1.1315750 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science and Technology Search Advanced Search |Citation Search