Concepedia

Metal Etching

Metal Etching is a subtractive surface modification technique within the domain of metal finishes that selectively removes material from a metal surface using chemical reagents or electrochemical processes to create predetermined patterns, textures, or functional microstructures.

384

Publications

12.7K

Citations

1.3K

Authors

383

Institutions

Publications per year

2017–2026

77

Parents

Publications

384

Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects

F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 511 citations

, , +17

Activating Inert Metallic Compounds for High‐Rate Lithium–Sulfur Batteries Through In Situ Etching of Extrinsic Metal

Meng Zhao, Hong‐Jie Peng, Zewen Zhang et al. · Angewandte Chemie International Edition · 2018 · 367 citations

, , +17

A Novel Method of Etching Copper Oxide Using Acetic Acid

K. Chávez, Dennis W. Hess · Journal of The Electrochemical Society · 2001 · 285 citations

, , +17

New Phenomena of Charge Damage in Plasma Etching: Heavy Damage Only through Dense-Line Antenna

Kouichi Hashimoto · Japanese Journal of Applied Physics · 1993 · 174 citations

, , +14

Microstructural investigation of white etching layer on pearlite steel rail

H.W. Zhang, Satoru Ohsaki, Shinji Mitao et al. · Materials Science and Engineering A · 2006 · 170 citations

, , +10

1–5 of 384

Authors

1.3K

  1. DW
    Dennis W. Hess

    Georgia Institute of Technology, United States

    8 publications · 469 citations

    8

    h-index

  2. YK
    Yue Kuo

    Texas A&M University, United States

    6 publications · 193 citations

    6

    h-index

  3. WF
    Weileun Fang

    National Tsing Hua University, Taiwan

    5 publications · 188 citations

    5

    h-index

  4. GL
    Galit Levitin

    Georgia Institute of Technology, United States

    5 publications · 130 citations

    5

    h-index

  5. MV
    M. V. Malyshev

    Columbia University, United States

    4 publications · 190 citations

    4

    h-index

1–5 of 1.3K

Institutions

383

  1. Georgia Institute of Technology

    Atlanta, United States

    9 h-index

    26 publications

    1.2K citations

  2. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    8 h-index

    37 publications

    4K citations

  3. National Tsing Hua University

    Hsinchu, Taiwan

    7 h-index

    24 publications

    792 citations

  4. The University of Texas at Austin

    Austin, United States

    7 h-index

    19 publications

    719 citations

  5. IMEC

    Leuven, Belgium

    7 h-index

    32 publications

    838 citations

  6. Centre National de la Recherche Scientifique

    Paris, France

    7 h-index

    26 publications

    507 citations

  7. Massachusetts Institute of Technology

    Cambridge, United States

    6 h-index

    13 publications

    415 citations

  8. National University of Singapore

    Singapore, Singapore

    6 h-index

    28 publications

    1.3K citations

1–8 of 383

Venues

  1. Journal of The Electrochemical Society

    JES · 28 publications · 1.5K citations

    17

    h-index

  2. Japanese Journal of Applied Physics

    JJAP · 18 publications · 544 citations

    14

    h-index

  3. 13

    h-index

  4. 12

    h-index

  5. Applied Physics Letters

    11 publications · 541 citations

    11

    h-index

1–5