Concepedia

R. E. Broadie

RE

1

Publications

506

Citations

1

H-Index

1991

Active since

Affiliations

IBM (United States)(Current)

R. E. Broadie is an author at IBM (United States) specializing in microfabrication, mechanical engineering, and applied physics.

Top concepts

Publications per year

1991–1991

1

Publications

1

Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects

F. B. Kaufman, Daniel B. Thompson, R. E. Broadie et al. · Journal of The Electrochemical Society · 1991 · 506 citations

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