R. E. Broadie - Concepedia

Author

R. E. Broadie

Also Known As

R. E. Broadie

Publications

506

Citations

H-Index

Concepts

All Affiliations

R. E. Broadie is an author at IBM (United States) specializing in microfabrication, mechanical engineering, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	1	1	506
2	Applied Physics	1	1	506
3	Materials Science	1	1	506
4	Mechanical Engineering	1	1	506
5	Interfacial Phenomena	1	1	506

R. E. Broadie

Publications

506

Citations

H-Index

Page 1

	Year	Citations
Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects F. B. Kaufman, Daniel B. Thompson, R. E. Broadie, Journal of The Electrochemical Society EngineeringMechanical EngineeringChip InterconnectsSurface TechnologyMaterial Processing	1991	506

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