Publication | Closed Access
Low energy ion beam machining of ULE® substrates: Evaluation of surface roughness
12
Citations
12
References
2008
Year
Materials ScienceIon ImplantationEngineeringMicrofabricationSurface RoughnessMechanical EngineeringUle® SubstratesIon BeamSurface FinishLow Energy IonAbrasive Machining
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