S.A. Pahlovy - Concepedia

Author

S.A. Pahlovy

Tokyo University of Science

Also Known As

S. A. PAHLOVY, S. A. Pahlovy, S.A. Pahlovy, Shahjada A. Pahlovy, Shahjada Ahemed Pahlovy

Publications

117

Citations

H-Index

Concepts

All Affiliations

Tokyo University of Science

About

S.A. Pahlovy is an author at Tokyo University of Science specializing in engineering, microfabrication, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	6	6	70
2	Applied Physics	5	5	58
3	Materials Science	5	5	57
4	Electrical Engineering	1	1	10
5	Materials Engineering	1	1	12

S.A. Pahlovy

Publications

Citations

H-Index

Page 1

	Year	Citations
Sharpening of CVD diamond coated tools by 0.5−10keV Ar+ ion beam Yoshiko Sato, Junki Kawamura, Takashi Nagase, Diamond and Related Materials Diamond-like CarbonIon ImplantationEngineeringApplied PhysicsAr+ Ion Beam	2011	13
Low energy ion beam machining of ULE® substrates: Evaluation of surface roughness Takuro Inaba, Yuichi Kurashima, S.A. Pahlovy, Microelectronic Engineering Materials ScienceIon ImplantationEngineeringMicrofabricationSurface Roughness	2008	12
Ripple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar1+ ion bombardment S.A. Pahlovy, Syeda Faria Mahmud, K. Yanagimoto, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringNm RmsSilicon On InsulatorIon ImplantationRoughness Exponent α	2011	12
Nanosmoothing of single crystal diamond chips by 1 keV Ar+ ion bombardment Takashi Nagase, Hiroyuki Kato, S.A. Pahlovy, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringIon ImplantationNanoengineeringMaterials FabricationIon Beam	2010	12
Ion beam fabrication of natural single crystal diamond nano-tips for potential use in atomic force microscopy Takashi Nagase, Junki Kawamura, S.A. Pahlovy, Microelectronic Engineering Materials ScienceAtomic Force MicroscopyDiamond-like CarbonEngineeringNanomaterials	2009	11
Low energy Xe+ ion beam machining of ULE® substrates for EUVL projection optics – Evaluation of high-spatial frequency roughness Hironori Endo, Takuro Inaba, S.A. Pahlovy, Microelectronic Engineering	2009	10
Low energy ion beam smoothening of artificially synthesized single crystal diamond chips with initial surface roughness of 0.08–0.4nm rms Syeda Faria Mahmud, Taiga Fukabori, S.A. Pahlovy, Diamond and Related Materials Materials ScienceElectrical EngineeringIon ImplantationEngineeringMicrofabrication	2011	10

Page 1