S.A. Pahlovy

Low energy ion beam machining of ULE® substrates: Evaluation of surface roughness

Takuro Inaba, Yuichi Kurashima, S.A. Pahlovy et al. · Microelectronic Engineering · 2008 · 13 citations

Engineering, Manufacturing Engineering, Materials Science +15

Sharpening of CVD diamond coated tools by 0.5−10keV Ar+ ion beam

Yoshiko Sato, Junki Kawamura, Takashi Nagase et al. · Diamond and Related Materials · 2011 · 13 citations

Engineering, Materials Engineering, Physics +6

Nanosmoothing of single crystal diamond chips by 1 keV Ar+ ion bombardment

Takashi Nagase, Hiroyuki Kato, S.A. Pahlovy et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 13 citations

Engineering, Materials Engineering, Materials Science +15

Ripple formation on atomically flat cleaved Si surface with roughness of 0.038 nm rms by low-energy Ar1+ ion bombardment

S.A. Pahlovy, Syeda Faria Mahmud, K. Yanagimoto et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 12 citations

Engineering, Materials Science, Physics +17

Ion beam fabrication of natural single crystal diamond nano-tips for potential use in atomic force microscopy

Takashi Nagase, Junki Kawamura, S.A. Pahlovy et al. · Microelectronic Engineering · 2009 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +13