Concepedia

Takuro Inaba

TI

Statistics

Publications

2

Citations

23

H-Index

2

Active since

2008

Affiliations

Tokyo University of Science(Current)

Takuro Inaba is an author at Tokyo University of Science specializing in manufacturing engineering, engineering, and machining-induced roughness.

Publications per year

2008–2009

2

Publications

2

Low energy ion beam machining of ULE® substrates: Evaluation of surface roughness

Takuro Inaba, Yuichi Kurashima, S.A. Pahlovy et al. · Microelectronic Engineering · 2008 · 13 citations

, , +15

Low energy Xe+ ion beam machining of ULE® substrates for EUVL projection optics – Evaluation of high-spatial frequency roughness

Hironori Endo, Takuro Inaba, S.A. Pahlovy et al. · Microelectronic Engineering · 2009 · 10 citations

, , +5

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