Concepedia
Microelectronic Engineering · 2009 · 10 citations · 11 references
EngineeringManufacturing EngineeringMaterials EngineeringOpticsMachiningSurface MetrologySurface RoughnessFocused Ion Beam Machining
11
Soft x-ray reduction lithography using multilayer mirrors
Hiroo Kinoshita, K. Kurihara, Yui Ishii et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 269 citations
Engineering, Materials Engineering, Materials Science +17
Investigation of TiO2SiO2 glasses by X-ray absorption spectroscopy
R.B. Greegor, Farrel W. Lytle, D. R. Sandstrom et al. · Journal of Non-Crystalline Solids · 1983 · 260 citations
Natural Sciences, Materials Engineering, Materials Science +14
Extreme Ultraviolet Lithography
Jeffrey Bokor · 1997 · 256 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
Extreme ultraviolet lithography
C. W. Gwyn, R. H. Stulen, Donald W. Sweeney et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 250 citations
R. H. Stulen, Donald W. Sweeney · IEEE Journal of Quantum Electronics · 1999 · 193 citations