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Hironori Endo

HE

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Publications

1

Citations

10

H-Index

1

Active since

2009

Affiliations

Tokyo University of Science(Current)

Hironori Endo is an author at Tokyo University of Science specializing in surface metrology, machining, and manufacturing engineering.

Publications per year

2009–2009

1

Publications

1

Low energy Xe+ ion beam machining of ULE® substrates for EUVL projection optics – Evaluation of high-spatial frequency roughness

Hironori Endo, Takuro Inaba, S.A. Pahlovy et al. · Microelectronic Engineering · 2009 · 10 citations

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