C. W. Gwyn

Extreme ultraviolet lithography

C. W. Gwyn, R. H. Stulen, Donald W. Sweeney et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 249 citations

Ultraviolet Light, Lithography Tool, Short Wavelength Optic +21

Model for Radiation-Induced Charge Trapping and Annealing in the Oxide Layer of MOS Devices

C. W. Gwyn · Journal of Applied Physics · 1969 · 139 citations

Engineering, Fused Silica, Silicon On Insulator +17

Radiation effects on semiconductor devices

B. L. Gregory, C. W. Gwyn · Proceedings of the IEEE · 1974 · 111 citations

Semiconductor Technology, Electrical Engineering, Engineering +10

The Analysis of Radiation Effects in Semiconductor Junction Devices

C. W. Gwyn, D.L. Scharfetter, Jochen Wirth · IEEE Transactions on Nuclear Science · 1967 · 100 citations

Device Modeling, Electrical Engineering, Semiconductor Device +11

Methods for Hierarchical Automatic Layout of Custom LSI Circuit Masks

Bryan Preas, C. W. Gwyn · Design Automation Conference · 1978 · 50 citations

Engineering, Electronic Design Automation, Electronic Design +17