Concepedia

Manabu Ando

MA

Statistics

Publications

7

Citations

120

H-Index

7

Active since

1989

Affiliations

Tokyo University of Science(Current)

Manabu Ando is an author at Tokyo University of Science specializing in surface metrology, engineering, and materials engineering.

Publications per year

1989–2008

7

Publications

7

Evaluation of surface roughness of ULE® substrates machined by Ar+ ion beam

Yuichi Kurashima, Shuhei Miyachi, Iwao Miyamoto et al. · Microelectronic Engineering · 2008 · 25 citations

, , +7

Processing efficiency of elastic emission machining for low‐thermal‐expansion material

Masahiko Kanaoka, Changling Liu, Kazushi Nomura et al. · Surface and Interface Analysis · 2008 · 25 citations

, , +9

<title>Super-smooth surface polishing on aspherical optics</title>

Manabu Ando, Mahito NEGISHI, Masafumi Takimoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 20 citations

, , +17

Low energy ion beam machining of ULE® substrates: Evaluation of surface roughness

Takuro Inaba, Yuichi Kurashima, S.A. Pahlovy et al. · Microelectronic Engineering · 2008 · 13 citations

, , +15

Studies of Super-Smooth Polishing on Aspherical Surfaces.

Mahito NEGISHI, Manabu Ando · Journal of the Japan Society for Precision Engineering · 1995 · 13 citations · Full text

, , +10

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