Concepedia

Author

Shuhei Miyachi

Tokyo University of Science

Also Known As

Shuhei Miyachi

1

Publications

25

Citations

1

H-Index

4

Concepts

All Affiliations

Tokyo University of Science
SM

About

Shuhei Miyachi is an author at Tokyo University of Science specializing in instrumentation, engineering, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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1

25

2

Mechanical Engineering

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1

25

3

Instrumentation

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1

25

4

Surface Science

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1

25

Shuhei Miyachi

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1

Publications

25

Citations

1

H-Index

YearCitations

Evaluation of surface roughness of ULE® substrates machined by Ar+ ion beam

Yuichi Kurashima, Shuhei Miyachi, Iwao Miyamoto,

Microelectronic Engineering

2008

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