Accurate modeling of air shear damping of a silicon lateral rotary micro-resonator for MEMS environmental monitoring applications

Squeeze film air damping in MEMS

Minhang Bao, Heng Yang · Sensors and Actuators A Physical · 2007 · 693 citations

Engineering, Materials Science, Aerodynamics +10

Quality factors in micron- and submicron-thick cantilevers

Kevin Yasumura, T. D. Stowe, Eugene M. Chow et al. · Journal of Microelectromechanical Systems · 2000 · 678 citations

Engineering, Materials Science, Mechanical Engineering +15

Thermophysical and transport properties of humid air at temperature range between 0 and 100°C

P.T. Tsilingiris · Energy Conversion and Management · 2007 · 472 citations

Natural Sciences, Mechanical Engineering, Heat Transfer +14

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Damping characteristics of beam-shaped micro-oscillators

Hiroshi Hosaka, Kiyoshi Itao, S. Kuroda · Sensors and Actuators A Physical · 1995 · 399 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11