Concepedia

Mems Metrology

MEMS Metrology is the systematic discipline of measurement science applied to micro-electromechanical systems, distinguished by its focus on the precise characterization, calibration, and quantification of physical, mechanical, and electrical parameters at the microscale to ensure accuracy, repeatability, and traceability in MEMS fabrication and performance evaluation.

363

Publications

11.9K

Citations

1.3K

Authors

364

Institutions

Publications per year

2017–2026

100

Parents

Publications

363

A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Horacio D. Espinosa, Barton C. Prorok, M. Fischer · Journal of the Mechanics and Physics of Solids · 2002 · 331 citations

, , +16

Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques

Xiaodong Li, Bharat Bhushan, Kazuki Takashima et al. · Ultramicroscopy · 2003 · 327 citations

, , +17

Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes

Marc S. Weinberg, A. Kourepenis · Journal of Microelectromechanical Systems · 2006 · 268 citations

, , +17

A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy

Ioannis Chasiotis, W. G. Knauss · Experimental Mechanics · 2002 · 227 citations

, , +16

Electrostatic correction of structural imperfections present in a microring gyroscope

Barry J. Gallacher, John Hedley, J.S. Burdess et al. · Journal of Microelectromechanical Systems · 2005 · 166 citations

, , +17

1–5 of 363

Authors

1.3K

  1. FM
    Fabrizio Mazzoleni

    Istituto Nazionale di Ricerca Metrologica, Italy

    6 publications · 160 citations

    6

    h-index

  2. AS
    Alessandro Schiavi

    Istituto Nazionale di Ricerca Metrologica, Italy

    6 publications · 160 citations

    6

    h-index

  3. RJ
    Ryszard J. Pryputniewicz

    Worcester Polytechnic Institute, United States

    5 publications · 67 citations

    5

    h-index

  4. AP
    Andrea Prato

    Istituto Nazionale di Ricerca Metrologica, Italy

    5 publications · 137 citations

    5

    h-index

  5. AR
    Anthony R. H. Goodwin

    Schlumberger (United States), United States

    5 publications · 133 citations

    5

    h-index

1–5 of 1.3K

Institutions

364

  1. Worcester Polytechnic Institute

    Worcester, United States

    9 h-index

    18 publications

    284 citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    9 h-index

    29 publications

    584 citations

  3. Politecnico di Milano

    Milan, Italy

    9 h-index

    28 publications

    898 citations

  4. University of California, Berkeley

    Berkeley, United States

    7 h-index

    19 publications

    974 citations

  5. National Physical Laboratory

    London, United Kingdom

    6 h-index

    9 publications

    643 citations

  6. National Taiwan University

    Taipei, Taiwan

    6 h-index

    16 publications

    467 citations

  7. Newcastle University

    Newcastle upon Tyne, United Kingdom

    6 h-index

    15 publications

    1.1K citations

  8. Istituto Nazionale di Ricerca Metrologica

    Turin, Italy

    6 h-index

    17 publications

    457 citations

1–8 of 364

Venues

  1. Sensors and Actuators A Physical

    42 publications · 1.3K citations

    24

    h-index

  2. 14

    h-index

  3. Microsystem Technologies

    21 publications · 434 citations

    13

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 12 publications · 412 citations

    11

    h-index

  5. Journal of Microelectromechanical Systems

    13 publications · 902 citations

    11

    h-index

1–5